Integrated High-temperature-resistant Vacuum Ball Valve

The valve body is precisely processed in one piece, and it is the designated model for high-temperature equipment such as MOCVD.
With a special internal structural design, it has a self-cleaning function, effectively preventing the deposition of materials.
This ensures a clean dynamic seal and prevents failures caused by contamination.
Leakage rate: ≤1x10-9 std. cc/sec. He.
Valve body material: SUS316L.
Sealing material of the valve core: PTFE.
Temperature range: Intermittent baking at -25°C~≤205°C.
It features a modular design, making maintenance convenient.
The valve body is equipped with a positioning lock, which is convenient for positioning.
It has a larger flow conductance CV value design compared to similar valves and can be used as a temporary sample window.
It provides a variety of connection methods such as internal thread NPT, KF flange, and socket welding.
Both manual and pneumatic driving methods are available.
The standard maintenance kit allows for easy maintenance of the valve.
2D and 3D models can be provided, and non-standard customization is accepted. If you have any needs, you can consult our sales engineers.
Note: The ball valve may be very "stiff" during the initial operation, which is a normal phenomenon.
  • Size parameters
  • Product Features
阀体一体式精密加工而成,MOCVD等高温设备指定使用型号。
特殊内部结构设计,拥有自清洁功能,有效防止物料沉积。
从而保证清洁的动态密封,防止因污染而导致故障。
泄漏率:≤1x10-9 std. cc/sec. He.
阀体材质:SUS316L。
阀芯密封材质:PTFE 。
温度范围:-25℃~≤205°C的间歇烘烤
模块化设计,方便维护。
阀体带有定位锁,方便定位。
比同类阀门更的大流导CV值设计,可做临时样品窗使用。
提供内螺纹 NPT、KF 法兰以及插焊等多种接口方式。
可提供手动气动两种驱动方式。
标准维护套件可以轻松维护阀门
可提供2D\3D模型,接受非标定制。如有需求可咨询销售工程师。
注意:球阀在初始操作时可能会非常“僵硬”,这是正常现象。