Vacuum Manual Butterfly Valve with CF Flange

It is suitable for rough pumping, side pumping, and backing line systems that require high flow conductance, low profile, quick opening, and throttling actions.


It is manually driven (pneumatic and electric driving methods can be provided upon request).


It occupies a small space, making it convenient for installation, disassembly, and maintenance.


The high-vacuum valve opens by rotation to provide a high gas conduction path.

It is recommended for use under operating conditions involving frequent replacement and cleaning.


It is recommended for applications where no line of sight or mechanical movement through the hole is required.

Leakage rate: 1.x10 -9 mbar L/s


Vacuum degree: 1x10 -9 Torr

Temperature range: Intermittent baking at ≤200°C (continuous at 150°C) to improve the ultimate vacuum.

2D and 3D models can be provided, and non-standard customization is accepted. If you have any needs, you can consult our sales engineers.
  • Size parameters
  • Product Features
适合需要高流导、低剖面、快速打开和节流动作的粗抽、旁抽和前级管路系统。
手动驱动(可根据要求提供气动和电动)。
空间占比小,方便安装及拆卸维护。
高真空阀旋转打开以提供高气体传导路径。
推荐在涉及频繁更换和清洁的操作条件下使用。
推荐用于不需要视线或机械运动穿过孔的应用。
漏率:1.x10 -9 mbar L/s
真空度:1x10 -9 Torr

温度范围:≤200°C的间歇烘烤(150°C连续),提高极限真空。

可提供2D\3D模型,接受非标定制。如有需求可咨询销售工程师。