It uses high - quality welded bellows to achieve full opening, thus enabling extremely high flow conductance.
The number of switching cycles in the laboratory can reach 1 million times.
Valve body material: SUS304
Bellows material: SUS321
Sealing method: Fluororubber
Pneumatic opening pressure: 1.2 bar
Leakage rate: 1.x10⁻⁹ mbar L/s
Vacuum level: 1x10⁻⁹ Torr