Valve body material: SUS304
Bellows
material: SUS321
Sealing method: Fluororubber
Pneumatic opening pressure: 1.2 bar
Leakage rate: 1.x10⁻⁹ mbar L/s
Vacuum degree: 1x10⁻⁹ Torr
There are multiple forms of flange interfaces and opening methods for customers to choose from.