Valve body material: SUS304
Bellows
material: SUS321
Sealing method: Fluororubber
Pneumatic opening pressure: 1.2 bar
Leakage rate: 1.x10⁻⁹ mbar L/s
Vacuum level: 1x10⁻⁹ Torr
There are various forms of flange interfaces and opening methods available for customers to choose from.