Valve body material: SUS304.
There are various forms of flange interfaces and driving methods available for selection.
Bellows material: SUS321.
Sealing method: Fluororubber.
Pneumatic opening pressure: 1.2 bar
Leakage rate: 1.x10⁻⁹ mbar L/s
Vacuum level: 1x10⁻⁹ Torr
It can withstand intermittent baking at 200°C (continuous at 150°C).