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Pneumatic Gate Valve with CF Flange for Vacuum System

It is applied in high-vacuum or ultra-high-vacuum systems in semiconductor and other processing fields, etc., to close the connection between the vacuum pump and the chamber.

There are various flange interface connection methods, such as CF, KF, ISO-K, ISO-F, etc.


Vacuum degree: 1.0×10⁻⁹ Torr

Temperature range: -25°C to ≤205°C

Material: SUS316L

Surface treatment: Inner and outer electrolytic polishing

With a patented design, it has the smallest external dimensions and provides the maximum flow conductance.


Service life: 100,000 times of opening

Two driving modes are provided: manual and pneumatic.


For manual valves with port sizes of 3 inches and below, there is no curved handle.

For pneumatic valves with port diameters of 1.5 inches and 10 diameters or larger, all models are equipped with magnetic switches for position indication.

Pneumatic valves will remain closed in case of power loss or air pressure loss.

Both 2D and 3D models can be provided, and non-standard customization is accepted. If you have any requirements, you can consult our sales engineers.

  • Size parameters
  • Product Features
It is applied in high-vacuum or ultra-high-vacuum systems in semiconductor and other processing fields, etc., to close the connection between the vacuum pump and the chamber.

There are various flange interface connection methods, such as CF, KF, ISO-K, ISO-F, etc.


Vacuum degree: 1.0×10⁻⁹ Torr

Temperature range: -25°C to ≤205°C

Material: SUS316L

Surface treatment: Inner and outer electrolytic polishing

With a patented design, it has the smallest external dimensions and provides the maximum flow conductance.


Service life: 100,000 times of opening

Two driving modes are provided: manual and pneumatic.


For manual valves with port sizes of 3 inches and below, there is no curved handle.

For pneumatic valves with port diameters of 1.5 inches and 10 diameters or larger, all models are equipped with magnetic switches for position indication.

Pneumatic valves will remain closed in case of power loss or air pressure loss.

Both 2D and 3D models can be provided, and non-standard customization is accepted. If you have any requirements, you can consult our sales engineers.

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