Pneumatic Gate Valve with KF Flange for Vacuum System

It is applied in high-vacuum or ultra-high-vacuum systems in semiconductor and other processing fields, etc., to close the connection between the vacuum pump and the chamber.

There are various flange interface connection methods, such as CF, KF, ISO-K, ISO-F, etc.


Vacuum degree: 1.0×10⁻⁹ Torr

Temperature range: -25°C to ≤205°C

Material: SUS316L

Surface treatment: Inner and outer electrolytic polishing

With a patented design, it has the smallest external dimensions and provides the maximum flow conductance.


Service life: 100,000 times of opening

Two driving modes are provided: manual and pneumatic.


For manual valves with port sizes of 3 inches and below, there is no curved handle.

For pneumatic valves with port diameters of 1.5 inches and 10 diameters or larger, all models are equipped with magnetic switches for position indication.

Pneumatic valves will remain closed in case of power loss or air pressure loss.

Both 2D and 3D models can be provided, and non-standard customization is accepted. If you have any requirements, you can consult our sales engineers.
  • Size parameters
  • Product Features
应用于半导体和其他加工领域等高真空或超高真空系统中,对真空泵和腔体之间的闭合。
多种法兰接口连接方式CF、KF、ISO-K、ISO-F等。
真空度:1.0*10 -9Torr,
温度范围:-25℃~≤205°C
材质:SUS316L
表面处理:内外电解抛光。
专利设计,最小的外形尺寸,提供最大的流导。
寿命:10万次开启。
提供手动或气动两种驱动方式。
手动阀端口在3"及及以下的型号无曲向手柄。
气动阀端口在1.5" 及壹拾径或更大的型号都包含用于位置指示的磁性开关。
气动阀在动力损失或气压损失的情况下保持关闭。
可提供2D\3D模型,接受非标定制。如有需求可咨询销售工程师。