It is used to discharge the gas in the vacuum chamber into the atmosphere, and can also be used as an inlet for conveying substances into the vacuum chamber.
Both KF and CF flanges are optional.
There are various forms of air tube terminal interfaces, such as MVCR, FVCR, LOK and TUBE.
The length of the air tube can be customized according to requirements.
CF Flange: -60°C to 315°C.
KF Flange: -20°C to 150°C.
Flange Material: SUS304.
Valve Material: SUS316.
Vacuum Degree: 1 x 10⁻⁹ Torr.
Both 2D and 3D models can be provided, and non-standard customization is accepted. If you have any requirements, you can consult our sales engineers.
