It is used to discharge the gas in the vacuum chamber into the atmosphere, and can also serve as an inlet for conveying substances into the vacuum chamber.
There are various forms of air tube terminal interfaces, including MVCR, FVCR, LOK and TUBE.
The length of the air tube can be customized according to your requirements.
Temperature range for CF flange: -60°C to 315°C.
Flange material: SUS304.
Valve material: SUS316.
Vacuum degree: 1.0 x 10⁻⁹ Torr.
Both 2D and 3D models are available. Non-standard customization is acceptable. If you have any specific needs, you can consult our sales engineers.
