Introduction to W-shaped and C-shaped seals

2024-07-19 16:51:55   Source: Maginoco website   visit:

      W-shaped and C-shaped seals are commonly used in modular gas systems (IGS) for semiconductor equipment, which consist of components such as diaphragm valves, one-way valves, pressure reducing valves, filters, pressure sensors, mass flow controllers, and base blocks. These components are generally surface mounted, and their sealing forms can be divided into W-shaped seals and C-shaped seals. Choosing the appropriate sealing form is crucial to ensure the sealing performance of the system. So what are the similarities and differences between W-shaped seals and C-shaped seals?



The similarities between W-shaped seal and C-shaped seal

      The W-shaped sealing gasket adopts a "floating" structure, and the sealing surface is independent of the components that bear external forces. During installation, the sealing surface of the gasket is compressed by the surface mounting components (such as the W-shaped sealing valve body) and the hardened circular arc surface on the base block, forming a seal. Each W-shaped seal can be installed separately in the system, making it easy to disassemble and reinstall when modifying the system layout. In addition, specialized gasket tweezers are required for W-shaped sealing gaskets during assembly to ensure the installation quality of the gaskets.


The difference between W-shaped seal and C-shaped seal

The cross-section of the C-shaped sealing gasket looks like the letter "C", with two flat convex sealing surfaces on both sides. When tightened appropriately, the top and bottom of the gasket are respectively compressed by surface mounting components (such as C-shaped sealing valve body) and the hardened sealing surface of the base block, forming a seal. In addition, when installing the C-shaped sealing gasket, a bracket can be used to locate and install multiple gaskets at once.



       For any modular gas system (IGS), W-shaped or C-shaped seals can meet the requirements, but due to the implementation of different SEMI standards, the structure of the sealing gasket and sealing surface is different. Users can choose the corresponding W-shaped or C-shaped seal according to their usage habits and the sealing form of the components.





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